Buried oxide layers formed by low dose SIMOX processes

B. Aspar; C. Guilhalmenc; C. Pudda; A. Garcia; A.M. Papon; A.J. Auberton-Herve; J.M. Lamure

作者B. Aspar; C. Guilhalmenc; C. Pudda; A. Garcia; A.M. Papon; A.J. Auberton-Herve; J.M. Lamure
卷第28卷
印刷ISSN0167-9317
文件大小391.25KB
发表时间1995
DOI10.1016/0167-9317(95)00086-n
页码411-414

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