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H[sub 2]O[sub 2]:HF:C[sub 4]O[sub 6]H[sub 6] (Tartaric Acid):H[sub 2]O Etching System for Chemical Polishing of GaSb

H[sub 2]O[sub 2]:HF:C[sub 4]O[sub 6]H[sub 6] (Tartaric Acid):H[sub 2]O Etching System for Chemical Polishing of GaSb

Berishev, I. E.

期刊名称Journal of The Electrochemical Society
作者Berishev, I. E.
卷第142卷
期第10期
印刷ISSN0013-4651
文件大小645.68KB
发表时间1995
DOI10.1149/1.2050040

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