A method for contact-free calibration of piezoelectrical actuators
- 期刊名称Review of Scientific Instruments
- 作者Müller, F.; Müller, A.-D.; Hietschold, M.
- 卷第66卷
- 期第9期
- 印刷ISSN0034-6748
- 文件大小529.13KB
- 发表时间1995
- DOI10.1063/1.1145318
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