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Characterization of buried SiNx films with EXAFS and NEXAFS

Characterization of buried SiNx films with EXAFS and NEXAFS

E.C. Paloura; A. Mertens; W. Frentrup; U. Döbler; A. Knop; W. Braun

作者E.C. Paloura; A. Mertens; W. Frentrup; U. Döbler; A. Knop; W. Braun
印刷ISSN0921-4526
文件大小159.20KB
发表时间1995
DOI10.1016/0921-4526(94)00736-f
页码509-510

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