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Elastic strain determination in semiconductor epitaxial layers by HREM

Elastic strain determination in semiconductor epitaxial layers by HREM

M.D. Robertson; J.M. Corbett; J.B. Webb; J. Jagger; J.E. Currie

作者M.D. Robertson; J.M. Corbett; J.B. Webb; J. Jagger; J.E. Currie
卷第26卷
期第6期
印刷ISSN0968-4328
文件大小1432.68KB
发表时间1995
DOI10.1016/0968-4328(95)00020-8
页码521-537

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