Characterization of electron beam induced modification of thermally grown SiO2

• 作者J. R. Barnes; A. C. F. Hoole; M. P. Murrell; M. E. Welland; A. N. Broers; J. P. Bourgoin; H. Biebuyck; M. B. Johnson; B. Michel
• 文件大小498.08KB
• 发表时间1995
• DOI10.1063/1.114485