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High Sensitivity Detection of Silicon Surface Reactions by Photoconductance Decay

Norga, Gerd J.; Black, M.R.; Black, K.A.; M'Saad, H.; Michel, Jürgen; Kimerling, Lionel C.

期刊名称Materials Science Forum
作者Norga, Gerd J.; Black, M.R.; Black, K.A.; M'Saad, H.; Michel, Jürgen; Kimerling, Lionel C.
电子ISSN1662-9752
文件大小318.50KB
发表时间1995
DOI10.4028/www.scientific.net/MSF.196-201.1531
页码1531-1536