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SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 23 October 1995)] Micromachining and Microfabrication Process Technology - <title>Advanced silicon etching using high-density plasmas</title>

SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 23 October 1995)] Micromachining and Microfabrication Process Technology - Advanced silicon etching using high-density plasmas

Bhardwaj, Jy K.; Ashraf, Huma; Markus, Karen W.
  • 作者Bhardwaj, Jy K.; Ashraf, Huma; Markus, Karen W.
  • 卷第2639卷
  • 印刷ISSN0277-786X
  • 文件大小752.53KB
  • 发表时间1995
  • DOI10.1117/12.221279
  • 页码224-233
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