Open Air Fabrication Process of Cu Thin Films on Teflon Surface Using Arf Excimer Laser Irradiation
- 期刊名称MRS Proceedings
- 作者Okoshi, M.; Toyoda, K.; Murahara, M.
- 卷第397卷
- 电子ISSN1946-4274
- 文件大小986.88KB
- 发表时间1995-1
- DOI10.1557/proc-397-655
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