In-flight particle diagnostics in induction plasma processing
- 作者S. Coulombe; M. I. Boulos
- 卷第15卷
- 期第4期
- 印刷ISSN0272-4324
- 电子ISSN1572-8986
- 文件大小843.08KB
- 发表时间1995-12
- DOI10.1007/bf01447065
- 页码653-675
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