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Measurement of hydrogen content in diamond like carbon thin films by ERDA

Measurement of hydrogen content in diamond like carbon thin films by ERDA

Y. Konishi; I. Konishi; N. Sakauchi; S. Hayashi; A. Hirakimoto; J. Suzuki

作者Y. Konishi; I. Konishi; N. Sakauchi; S. Hayashi; A. Hirakimoto; J. Suzuki
卷第118卷
印刷ISSN0168-583X
文件大小698.96KB
发表时间1996
DOI10.1016/0168-583x(95)01098-x
页码312-317

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