Inductive plasmas for plasma processing
- 期刊名称Plasma Sources Science and Technology
- 作者Keller, John H
- 卷第5卷
- 期第2期
- 印刷ISSN0963-0252
- 电子ISSN1361-6595
- 文件大小177.90KB
- 发表时间1996-05-01
- DOI10.1088/0963-0252/5/2/008
- 页码166-172
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