Proximity effect correction for nanolithography
- 期刊名称Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- 作者Rau, Richard
- 卷第14卷
- 期第4期
- 印刷ISSN0734-211X
- 文件大小1108.90KB
- 发表时间1996-7
- DOI10.1116/1.588752
Book NotesReview by: F. N. H., H. E. B., M. M. W., T. J. W., Jr., L. L. B., G. G. J. and R. B. V. · Social Forces · 1929
ANALYSES BIBLIOGRAPHIQUESReview by: G. F., L. A., A. L., R. L., T. P., J. K., B. L., H. L., P. M., B. N., W. L., E. Sch., G. S., E. M. and G. Ch. · Le Travail Humain · 1934
[untitled]Review by: T. B. L. Webster · The Journal of Roman Studies · 1929
[untitled]Review by: T. B. L. W. · The Journal of Roman Studies · 1930
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[untitled]Review by: T. B. L. Webster · The Classical Review (New Series) · 1952
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[untitled]Review by: T. B. L. Webster · The Classical Review · 1947
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