Deposition of DLC films in and r.f. plasmas
- 期刊名称Diamond and Related Materials
- 作者Mutsukura, Nobuki; Yoshida, Katsu-ichi
- 卷第5卷
- 期第9期
- 印刷ISSN0925-9635
- 文件大小404.22KB
- 发表时间1996-7
- DOI10.1016/0925-9635(95)00495-5
- 页码919-922
EditorialGatti, Flavio · Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment · 2004
CommitteesNuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment · 2004
List of participantsNuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment · 2004
Conference photoNuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment · 2004
EditorialBates, Richard · Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment · 2009
CommitteesNuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment · 2009
List of participantsNuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment · 2009
ContentsNuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment · 2004