A study of the ultra precision grinding process on a magnetic disk substrate—development of new bonding materials for fixed abrasives of grinding stone

• 作者Y. Tomita; H. Eda
• 卷第195卷
• 印刷ISSN0043-1648
• 文件大小827.17KB
• 发表时间1996
• DOI10.1016/0043-1648(95)06792-2
• 页码74-80