Micromachined microdevices and microinstruments
N.C. MacDonald; S.G. Adams; A.A. Ayon; K.F. Böhringer; L.-Y. Chen; J.H. Das; D. Haronian; W. Hofmann; X.T. Huang; A. Jazairy; R.E. Mihailovich; S.A. Miller; I. Ogo; R. Prasad; B.W. Reed; M.T.A. Saif; K.A. Shaw; R.Y. Webb; Y. Xu
- 作者N.C. MacDonald; S.G. Adams; A.A. Ayon; K.F. Böhringer; L.-Y. Chen; J.H. Das; D. Haronian; W. Hofmann; X.T. Huang; A. Jazairy; R.E. Mihailovich; S.A. Miller; I. Ogo; R. Prasad; B.W. Reed; M.T.A. Saif; K.A. Shaw; R.Y. Webb; Y. Xu
- 卷第30卷
- 印刷ISSN0167-9317
- 文件大小1409.49KB
- 发表时间1996
- DOI10.1016/0167-9317(95)00310-x
- 页码563-564