Deposition of Co-Cr films with excellent c-axis orientation and uniform thickness for rigid disks using compact sputtering apparatus
- 期刊名称IEEE Transactions on Magnetics
- 作者Kitamoto, Y.; Abe, M.; Naoe, M.
- 卷第32卷
- 期第5期
- 印刷ISSN0018-9464
- 文件大小264.81KB
- 发表时间1996
- DOI10.1109/20.539076
- 页码4547-4549
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