Atomic Layer Etching of Porous Silicon
- 期刊名称MRS Proceedings
- 作者Libon, I. H.; Voelkmann, C.; Petrova-Koch, V.; Koch, F.
- 卷第452卷
- 电子ISSN1946-4274
- 文件大小297.79KB
- 发表时间1996-1
- DOI10.1557/proc-452-511
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