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Role of high activation energy homogeneous chemical reactions in affecting CVD-rates and deposit quality for heated surfaces

Role of high activation energy homogeneous chemical reactions in affecting CVD-rates and deposit quality for heated surfaces

Jose L. Castillo; Daniel E. Rosner
  • 作者Jose L. Castillo; Daniel E. Rosner
  • 卷第51卷
  • 期第24期
  • 印刷ISSN0009-2509
  • 文件大小1494.61KB
  • 发表时间1996
  • DOI10.1016/s0009-2509(96)00336-3
  • 页码5325-5340
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