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Real-Time Monitoring of Hydrogen Elimination Processes in Pulsed-Gas PECVD Using in Situ Mass Spectroscopy

Real-Time Monitoring of Hydrogen Elimination Processes in Pulsed-Gas PECVD Using in Situ Mass Spectroscopy

Srinivasan, Easwar; Bordeaux, Jeremy S.; Parsons, Gregory N.

期刊名称MRS Proceedings
作者Srinivasan, Easwar; Bordeaux, Jeremy S.; Parsons, Gregory N.
卷第452卷
电子ISSN1946-4274
文件大小396.37KB
发表时间1996-1
DOI10.1557/proc-452-755

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