Electron-Cyclotron-Resonance Sputtered
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Thin Films
Itsumi, Manabu; Ohfuji, Shin-ichi; Akiya, Hideo
- 期刊名称Japanese Journal of Applied Physics
- 作者Itsumi, Manabu; Ohfuji, Shin-ichi; Akiya, Hideo
- 卷第35卷
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小805.33KB
- 发表时间1996-9-30
- DOI10.1143/jjap.35.4963
- 页码4963-4966