Interconnect Process Technology Using Perfluorocyclobutane (PFCB)
- 期刊名称MRS Proceedings
- 作者Townsend, P. H.; Shaffer, E. O.; Mills, M. E.; Blackson, J.; Radler, M. J.
- 卷第443卷
- 电子ISSN1946-4274
- 文件大小2473.06KB
- 发表时间1996-1
- DOI10.1557/proc-443-35
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