Self-consistent particle simulation of RF discharge in argon based on detailed collision data
- 作者K Nanbu; Y Kitatani
- 卷第47卷
- 印刷ISSN0042-207X
- 文件大小307.08KB
- 发表时间1996
- DOI10.1016/0042-207x(96)00116-9
- 页码1023-1025
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