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Interfacial structure control of cubic boron nitride films prepared by ion-beam assisted deposition

Interfacial structure control of cubic boron nitride films prepared by ion-beam assisted deposition

Y. Setsuhara; T. Suzuki; Y. Tanaka; S. Miyake; M. Suzuki; M. Kumagai; K. Ogata; M. Kohata; K. Higeta; T. Einishi; Y. Suzuki; Y. Shimoitani; Y. Motonami
  • 作者Y. Setsuhara; T. Suzuki; Y. Tanaka; S. Miyake; M. Suzuki; M. Kumagai; K. Ogata; M. Kohata; K. Higeta; T. Einishi; Y. Suzuki; Y. Shimoitani; Y. Motonami
  • 印刷ISSN0168-583X
  • 文件大小589.84KB
  • 发表时间1997
  • DOI10.1016/s0168-583x(97)00020-7
  • 页码851-856
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