[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - A decade of MEMS and its future

• 作者Fujita, H.
• 文件大小708.33KB
• 发表时间1997
• DOI10.1109/MEMSYS.1997.581729
• 页码1-7