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[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Angular micropositioner for disk drives

[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Angular micropositioner for disk drives

Horsley, D.A.; Singh, A.; Pisano, A.P.; Horowitz, R.
  • 作者Horsley, D.A.; Singh, A.; Pisano, A.P.; Horowitz, R.
  • 文件大小835.91KB
  • 发表时间1997
  • DOI10.1109/memsys.1997.581890
  • 页码454-459
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