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[IEEE 1997 21st International Conference on Microelectronics. Proceedings - Nis, Yugoslavia (14-17 Sept. 1997)] 1997 21st International Conference on Microelectronics. Proceedings - 2D modelling of mechanical stress evolution and electromigration in confined aluminum interconnects

[IEEE 1997 21st International Conference on Microelectronics. Proceedings - Nis, Yugoslavia (14-17 Sept. 1997)] 1997 21st International Conference on Microelectronics. Proceedings - 2D modelling of mechanical stress evolution and electromigration in confined aluminum interconnects

Petrescu, V.; Mouthaan, A.J.
  • 作者Petrescu, V.; Mouthaan, A.J.
  • 卷第2卷
  • 文件大小392.09KB
  • 发表时间1997
  • DOI10.1109/icmel.1997.632920
  • 页码629-632
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