[IEEE 1997 IEEE International SOI Conference Proceedings - Fish Camp, CA, USA (6-9 Oct. 1997)] 1997 IEEE International SOI Conference Proceedings - Efficient production of silicon-on-insulator films by co-implantation of He/sup +/ with H/sup +/
Agarwal, A.; Haynes, T.E.; Venezia, V.C.; Eaglesham, D.J.; Welson, M.K.; Chabal, Y.J.; Holland, O.W.
- 作者Agarwal, A.; Haynes, T.E.; Venezia, V.C.; Eaglesham, D.J.; Welson, M.K.; Chabal, Y.J.; Holland, O.W.
- 文件大小734.58KB
- 发表时间1997
- DOI10.1109/soi.1997.634924
- 页码44-45