Microelectronic test structures for rapid automated contactless inline defect inspection
- 期刊名称IEEE Transactions on Semiconductor Manufacturing
- 作者Satya, A.V.S.
- 卷第10卷
- 期第3期
- 印刷ISSN0894-6507
- 文件大小222.90KB
- 发表时间1997
- DOI10.1109/66.618211
- 页码384-389
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