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[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - A piezoresistive accelerometer with a novel vertical beam structure

[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - A piezoresistive accelerometer with a novel vertical beam structure

Hong Chen, ; Minhang Bao, ; Haijun Zhu, ; Shaoqun Shen,
  • 作者Hong Chen, ; Minhang Bao, ; Haijun Zhu, ; Shaoqun Shen,
  • 卷第2卷
  • 文件大小420.56KB
  • 发表时间1997
  • DOI10.1109/sensor.1997.635421
  • 页码1201-1204
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