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Neutral product analysis of the microwave C[sub 2]H[sub 2] plasma: C[sub n], C[sub n]H[sub 2], C[sub n]H[sub 3], C[sub n]H[sub 4], C[sub n]H[sub 5], and larger species

Neutral product analysis of the microwave C[sub 2]H[sub 2] plasma: C[sub n], C[sub n]H[sub 2], C[sub n]H[sub 3], C[sub n]H[sub 4], C[sub n]H[sub 5], and larger species

Fujii, Toshihiro

期刊名称Journal of Applied Physics
作者Fujii, Toshihiro
卷第82卷
期第5期
印刷ISSN0021-8979
文件大小307.74KB
发表时间1997
DOI10.1063/1.366093

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