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[IEEE SISPAD '97. 1997 International Conference on Simulation of Semiconductor Processes and Devices. Technical Digest - Cambridge, MA, USA (8-10 Sept. 1997)] SISPAD '97. 1997 International Conference on Simulation of Semiconductor Processes and Devices. Technical Digest - Methodology for predictive calibration of TCAD simulators

[IEEE SISPAD '97. 1997 International Conference on Simulation of Semiconductor Processes and Devices. Technical Digest - Cambridge, MA, USA (8-10 Sept. 1997)] SISPAD '97. 1997 International Conference on Simulation of Semiconductor Processes and Devices. Technical Digest - Methodology for predictive calibration of TCAD simulators

Le Carval, G.; Scheiblin, P.; Poncet, D.; Rivallin, P.
  • 作者Le Carval, G.; Scheiblin, P.; Poncet, D.; Rivallin, P.
  • 文件大小286.90KB
  • 发表时间1997
  • DOI10.1109/sispad.1997.621366
  • 页码177-180
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