Al3O3 thin film growth on Si(100) using binary reaction sequence chemistry
- 作者A.W. Ott; J.W. Klaus; J.M. Johnson; S.M. George
- 卷第292卷
- 印刷ISSN0040-6090
- 文件大小1019.78KB
- 发表时间1997
- DOI10.1016/s0040-6090(96)08934-1
- 页码135-144
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