Strength Evaluation Technique for Dislocation Generation in Si Substrate using Ball Indenter.
- 期刊名称Transactions of the Japan Society of Mechanical Engineers Series A
- 作者OHTA, Hiroyuki; MIURA, Hideo; KITANO, Makoto
- 卷第63卷
- 期第605期
- 印刷ISSN0387-5008
- 电子ISSN1884-8338
- 文件大小896.80KB
- 发表时间1997
- DOI10.1299/kikaia.63.183
- 页码183-188
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