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Broadband spectral operation of a rotating-compensator ellipsometer

J. Opsal; J. Fanton; J. Chen; J. Leng; L. Wei; C. Uhrich; M. Senko; C. Zaiser; D.E. Aspnes

作者J. Opsal; J. Fanton; J. Chen; J. Leng; L. Wei; C. Uhrich; M. Senko; C. Zaiser; D.E. Aspnes
印刷ISSN0040-6090
文件大小187.83KB
发表时间1998
DOI10.1016/s0040-6090(97)00769-4
页码58-61