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Surface smoothing effects with reactive cluster ion beams

Surface smoothing effects with reactive cluster ion beams

Noriaki Toyoda; Hiroaki Kitani; Norihisa Hagiwara; Jiro Matsuo; Isao Yamada

作者Noriaki Toyoda; Hiroaki Kitani; Norihisa Hagiwara; Jiro Matsuo; Isao Yamada
卷第54卷
印刷ISSN0254-0584
文件大小517.36KB
发表时间1998
DOI10.1016/s0254-0584(98)00095-9
页码106-110

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