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Nucleation behaviour during silicon UHV-CVD on Si(111)7×7

Nucleation behaviour during silicon UHV-CVD on Si(111)7×7

D. Albertini; F. Thibaudau; L. Masson; F. Salvan

作者D. Albertini; F. Thibaudau; L. Masson; F. Salvan
卷第400卷
印刷ISSN0039-6028
文件大小1026.80KB
发表时间1998
DOI10.1016/s0039-6028(97)00847-9

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