Microfabrication by electrochemical metal removal
- 期刊名称IBM Journal of Research and Development
- 作者Datta, M.
- 卷第42卷
- 期第5期
- 印刷ISSN0018-8646
- 电子ISSN0018-8646
- 文件大小1478.27KB
- 发表时间1998
- DOI10.1147/rd.425.0655
- 页码655-670
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