[IEEE ISCAS '98 1998 IEEE International Symposium on Circuits and Systems - Monterey, CA, USA (31 May-3 June 1998)] ISCAS '98. Proceedings of the 1998 IEEE International Symposium on Circuits and Systems (Cat. No.98CH36187) - Electro-mechanical properties of a micromachined varactor with a wide tuning range [for VCO]