Pore formation on the silicon–metal interface in silicon–on–insulator structures
Akimov, A. G.; Barabanenkov, M. Yu.; Mordkovich, V. N.
- 期刊名称Journal of Applied Physics
- 作者Akimov, A. G.; Barabanenkov, M. Yu.; Mordkovich, V. N.
- 卷第83卷
- 期第12期
- 印刷ISSN0021-8979
- 文件大小295.86KB
- 发表时间1998
- DOI10.1063/1.367879