Dose rate effects in focused ion beam synthesis of cobalt disilicide

• 期刊名称Applied Physics Letters
• 作者Hausmann, Stephan; Bischoff, Lothar; Teichert, Jochen; Voelskow, Matthias; Grambole, Dieter; Herrmann, Folker; Möller, Wolfhard
• 卷第72卷
• 期第21期
• 印刷ISSN0003-6951
• 文件大小472.75KB
• 发表时间1998
• DOI10.1063/1.121110