[IEEE 1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98 - Kyoto, Japan (22-26 June 1998)] 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) - Superior latch-up resistance of high dose, high energy implanted p/sup +/ buried layers
- 作者Leong, K.C.; Liu, P.C.; Morris, W.; Rubin, L.; Gan, C.H.; Chan, L.
- 卷第1卷
- 文件大小277.59KB
- 发表时间1998
- DOI10.1109/iit.1999.812061
- 页码99-101
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