[IEEE 1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98 - Kyoto, Japan (22-26 June 1998)] 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) - Abatement of hazardous ion implant gases: experimental results

• 作者Arno, J.; Boyd, W.; Rendon, M.J.; Romig, T.
• 卷第1卷
• 文件大小390.22KB
• 发表时间1998
• DOI10.1109/iit.1999.812097
• 页码243-246