[IEEE 1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98 - Kyoto, Japan (22-26 June 1998)] 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) - Thermal based mass flow control for ion implant SDS(R) applications
- 作者Krell, J.; Brown, B.
- 卷第1卷
- 文件大小317.43KB
- 发表时间1998
- DOI10.1109/iit.1999.812131
- 页码373-376
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