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[IEEE 1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98 - Kyoto, Japan (22-26 June 1998)] 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) - Comparison of implant charging results obtained with QUANTOX(R) and CHARM(R)-2

[IEEE 1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98 - Kyoto, Japan (22-26 June 1998)] 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) - Comparison of implant charging results obtained with QUANTOX(R) and CHARM(R)-2

Daryanami, S.; Shields, J.

作者Daryanami, S.; Shields, J.
卷第1卷
文件大小470.92KB
发表时间1998
DOI10.1109/iit.1999.812203
页码662-665

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