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Real Time Spectroscopic Ellipsometry Studies of the Solid Phase Crystallization of Amorphous Silicon

Real Time Spectroscopic Ellipsometry Studies of the Solid Phase Crystallization of Amorphous Silicon

Fujiwara, H.; Koh, Joohyun; Lee, Yeeheng; Wronski, C. R.; Collins, R. W.

期刊名称MRS Proceedings
作者Fujiwara, H.; Koh, Joohyun; Lee, Yeeheng; Wronski, C. R.; Collins, R. W.
卷第507卷
电子ISSN1946-4274
文件大小458.42KB
发表时间1998-1
DOI10.1557/proc-507-939

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