Pulsed plasma-enhanced chemical vapor deposition from hexafluoropropylene oxide: Film composition study

• 作者Scott J. Limb; David J. Edell; Edward F. Gleason; Karen K. Gleason
• 卷第67卷
• 期第8期
• 印刷ISSN0021-8995
• 电子ISSN1097-4628
• 文件大小296.22KB
• 发表时间1998
• DOI10.1002/(sici)1097-4628(19980222)67:8<1489::aid-app14>3.0.co;2-x
• 页码1489-1502