Fine Feed by Preload Change of Lead Screws. Application to Ultraprecision Positioning.
- 期刊名称Transactions of the Japan Society of Mechanical Engineers Series C
- 作者NAKASHIMA, Katuhiro; TAKAFUJI, Kazuki; TAMARU, Yuuma
- 卷第64卷
- 期第621期
- 印刷ISSN0387-5024
- 电子ISSN1884-8354
- 文件大小775.36KB
- 发表时间1998
- DOI10.1299/kikaic.64.1829
- 页码1829-1835
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