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[ASCE STRESS INDUCED PHENOMENA IN METALLIZATION - Tokyo (Japan) (4-6 Jun 1997)] Fourth international workshop on stress induced phenomena in metallization - Diffusion barriers between Si and Cu

[ASCE STRESS INDUCED PHENOMENA IN METALLIZATION - Tokyo (Japan) (4-6 Jun 1997)] Fourth international workshop on stress induced phenomena in metallization - Diffusion barriers between Si and Cu

Mori, Hidetsugu; Imahori, Junji; Oku, Takeo; Murakami, Masanori

作者Mori, Hidetsugu; Imahori, Junji; Oku, Takeo; Murakami, Masanori
文件大小590.26KB
发表时间1998
DOI10.1063/1.54670
页码475-480

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