[ASCE STRESS INDUCED PHENOMENA IN METALLIZATION - Tokyo (Japan) (4-6 Jun 1997)] Fourth international workshop on stress induced phenomena in metallization - Barrier layer formation on
Sekiguchi, Mitsuru; Ueda, Satoshi; Tamaki, Tokuhiko; Mayumi, Shuichi
- 作者Sekiguchi, Mitsuru; Ueda, Satoshi; Tamaki, Tokuhiko; Mayumi, Shuichi
- 文件大小635.24KB
- 发表时间1998
- DOI10.1063/1.54669
- 页码469-474